W. M. Keck Microfabrication Facility
CSM
MSU PA
MSU
Equipment Resouces
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Hitachi S-4700II FESEM
JEOL 840A SEM
Scanning Probe Microscope
X-ray Microanalyzer
Micro Raman Spectrograph
Optical Microscope
Optial Imaging system
Mask Aligner
Resist Preparation equipment
Thin film deposition systems
O2 Plasma Etcher
Vacuum Oven
High resolution XRD
Sputter coater
Surface Profiler
Wafer Dicing Saw
Hitachi S-4700II FESEM
JEOL 840A SEM for electron beam lithography
Scanning Probe Microscope
X-ray Microanalyzer
Micro Raman Spectrograph
Optical Microscope
Optial Imaging system
Mask Aligner
Resist Preparation equipment
Thin film deposition systems
O2 Plasma Etcher
Vacuum Oven
High resolution X-ray diffractometer
Sputter coater for SEM sample prep.
Surface Profiler
Wafer Dicing Saw
