Hitachi S-4700II Field Emission Scanning Electron Microscope

The S-4700II field emission scanning electron microscope (FESEM), the latest addition to the KMF, offers superb spatial resolution due to its cold field emission source and improved column design. Its excellent low voltage capability permits direct imaging on non-conducting materials without the need of metallization. The FESEM is fully computer controlled with a comfortable GUI under the familiar Windows 95 operating system. Images can be saved directly in digital format with up to 2,560 x 1,920 pixels, and can be transferred to any location using standard networking protocols. The FESEM is also equipped with a EDAX Phoenix energy dispersive X-ray spectrometer system for microanalysis, a chamber scope for direct chamber viewing and a backscattered electron detector for Z contrast.

Key Features:

• Acceleration voltage: up to 30 kV
• Filament type: Cold field emission
• Resolution (12 mm WD): 1.5 nm at 15 kV, and 2.5 nm at 1 kV.
• OS: Windows 95

Usage

• The FESEM is primarilly used to acquire a high resolution image of a sample. The image is made of signals of secondary electron emission from the sample surface, and therefore does not contain any height information.
• The attached EDS system can be used to identify the elemental composition of a sample. However, it is not a good tool to determine the chemical composition

Limitations and restrictions

• Samples can not be good insulators such as glass or quartz. These type of samples must be coated with metal to avoid charging
• Samples should be clean and of the solid state type. Volatile and biological samples should not be introduced into the system.
• Samples should be less than 100 mm in diameter, and 6 mm in thickness