W. M. Keck Microfabrication Facility
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MSU PA
MSU
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Scanning Probe Microscope - Dimension 3100 SPM

Dimension 3100 SPM

The Dimension 3100 is a very versatile scanning probe microscope. It supports all popular scanning modes such as atomic force microscopy (AFM), scanning tunneling microscopy (STM), and magnetic force microscopy (MFM). Samples up to eight inches in diameter can be mounted directly on to the motorized stage and be imaged in ambient air or fluids.

Key Features:

  • Noise Level: <0.5Å RMS in vertical (Z) direction
  • X-Y imaging area approx. 90µm x 90µm
  • Z range approx. 6µm
  • Lateral accuracy typically within 1%, maximum 2%
  • Provides full 16-bit resolution on all axes for all scan sizes and offsets.
  • Accepts samples up to eight inches in diameter in air or fluids
  • Little or no sample preparation is required
  • Rigid, low vibration construction for superior image quality
  • Integrated top-view color video optics with 1.5µm resolution and zoom
  • Easily changes among all AFM/STM scanning modes/techniques without tools
  • Laser spot alignment window for easy setup
  • Extensive suite of image analysis software

Usage

  • The DI SPM can be operated under different modes including Contact AFM, Tapping AFM, MFM, and STM
  • AFM (contact or tapping) is used to acquire a 3-dimensional image on micrometer or nanometer scale.
  • MFM is used to acquire a 2-dimensional image on micrometer or nanometer scale showing the magnetic property of the sample
  • STM is used to acquire a 2-dimensional image on micrometer or nanometer scale showing the density of state of electrons.
  • Once a 2D or a 3D image is acquired, many types of analysis on the image can be done

Limitations and Restrictions

  • The radius of AFM tips is about 5 - 15 nm, which sets the uppper limit of X/Y resolution.
  • The pixel density of the image is limited to 512 x 512, and in most cases, to 256 x 256. Due to the low pixel density of the image, the dynamic range of the Fourier analysis on the AFM images is limited.
  • The scan area is pratically limited to 50 x 50 micrometers and 5 micrometers in height, even though the actual size of the sample can be much larger.