W. M. Keck Microfabrication Facility
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Hitachi S-4700II FESEM
JEOL 840A SEM
Scanning Probe Microscope
X-ray Microanalyzer
Micro Raman Spectrograph
Optical Microscope
Optial Imaging system
Mask Aligner
Resist Preparation equipment
Thin film deposition systems
O2 Plasma Etcher
Vacuum Oven
High resolution XRD
Sputter coater
Surface Profiler
Wafer Dicing Saw

Energy Dispersive X-ray Spectrometer (EDS)

Phoenix EDS

The facility is equipped with a new EDAX Phoenix energy dispersive X-ray system (EDS).

The power of the Phoenix system relies on both its software and hardware. The Phoenix software is designed around the Windows NT environment with true 32 bit coding and multitasking. The new SiLi crystal detector, on the other hand, provides the light element sensitivity all the way down to boron, and high efficiency/low noise, and energy resolution.

Key features:

  • Energy resolution of 135 eV
  • Light element sensitive down to boron
  • Qualitative X-ray analysis
  • Quantitative X-ray analysis
  • X-ray mapping (fast map and quant map)
  • Spot, array and line scan mode.