There are several thin film deposition systems available in the facility.

The turbo pumped Edward Auto306 thermal evaporator is equipped with a rotating turret for evaporating multiple materials without the need to break the system vacuum. The rotating work holder improves the uniformity of evaporated thin films. It also has a tilt/rotating holder for depositing thin films at an angle.

The Edward Scancoat Six sputter coater can be used to sputter Au and to evaporate carbon using its thermal source for SEM/EBL sample preperation.