W. M. Keck Microfabrication Facility
  CSM
MSU PA
MSU
Equipment Resource
 

Vacuumn Oven

YES LP-III

The YES LP-III vacuum oven can be used for baking out samples under vacuum environment.

The YES LP-III has the following key features:

  • Microprocessor controller to ensures precise, reproducible process conditions and automatic operation.
  • Oven heater up to 200 C
  • Vacuum below 1 torr through mechanical pumping