W. M. Keck Microfabrication Facility
  CSM
MSU PA
MSU
Equipment Resource
 

Dektak3 Surface Profiler

Dektak surface profiler

The topography of devices during fabrication process can be checked using a surface profiler. The DekTak3 surface profiler provides:

  • A 0.5 nm vertical resolution
  • Single or multiple scan routines
  • Variety analytical functions
  • Easy operation