W. M. Keck Microfabrication Facility
  CSM
MSU PA
MSU
New Facility
 

The current KMF facility in the Biomedical and Physical Science Building

The 3500 s.f. facility features a Class 100 cleanroom for photoresist preparation and photolithography, three bays for scanning electron microscopy and electron beam lithography, and a large space for installing the various vacuum systems for thin film preparations and characterization. The new facility is also located at the center of academic buildings on MSU campus. It will play a key role for many projects of our research community.


A 3D view of the new facility